Dewan, Nasim Ahmed, McNally, Patrick J. ORCID: 0000-0003-2798-5121 and Herbert, P.A.F.
(2002)
Plasma modeling for a nonsymmetric capacitive discharge driven by a nonsinusoidal radio frequency current.
Journal of Applied Physics, 91
(9).
ISSN 0021-8979
Dewan, Nasim Ahmed (2001) Analysis and modelling of the impact of plasma RF harmonics in semiconductor plasma processing. PhD thesis, Dublin City University.